Class | 1 | 10 | 100 | 1,000 | 10,000 | 100,000 |
Ventilation frequency | - | - | 250 - 400 | 150 | 75 | 20 |
Particle concentration (pcs/CFT) | 1 | 10 | 100 | 1,000 | 10,000 | 100,000 |
Metric equivalent (pcs/CBM) | 35 | 353 | 3,530 | 35,300 | 353,000 | 3,530,000 |
ISO class equivalent | 3 | 4 | 5 | 6 | 7 | 8 |
Examples of site | - | - | LCD/IC Precision industry |
Surgery room | Pharmaceutical factory |
PC assembly plant |
Class | 0.1µm | 0.2µm | 0.3µm | 0.5µm | 1µm | 5µm |
ISO1 | 10 | 2 | ||||
ISO2 | 100 | 24 | 10 | 4 | ||
ISO3 | 1,000 | 237 | 102 | 35 | 8 | |
ISO4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
ISO5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
ISO6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO7 | 3,520,000 | 83,200 | 2,930 | |||
ISO8 | 35,200,000 | 832,000 | 29,300 | |||
ISO9 | 8,320,000 | 293,000 |
Model | OFU-102H-AW | OFU-105H-AW | OFU-110H-AW | OFU-117H-AW |
Max. air volume | 2m3 /min | 5m3 /min | 10m3 /min | 17m3/min |